ENVIRONMENTAL STEWARDSHIP

At Axcelis Technologies, we are committed to taking an active part in protecting the health and safety of our most valuable assets - our employees and customers. In addition, Axcelis is committed to protecting the environment and the public health of the communities in which we operate. Axcelis has been certified to the ISO 14001 Environmental Management System standard since 2000 and we maintain a comprehensive environmental management system that defines and tracks site performance to environmental, health and safety goals. The company also subscribes to the Electronic Industry Citizenship Coalition’s (EICC) Code of Conduct as a supplier to EICC member companies, and is involved in SEMI's Global Care, a semiconductor and equipment industry initiative designed to establish a framework on which the diverse membership of SEMI can build and strengthen commitment to the environment, health and safety.

ISO 14001 Environmental Management System

Our Environmental policy states:

Axcelis Technologies is committed to protecting the environment, and the public health of the communities in which we operate.

  • We are committed to compliance with all environmental regulations, legislation, and other environmental requirements applicable to our business and its environmental aspects.
  • We conserve natural resources. 
  • We continually improve our environmental management systems.  
  • We set appropriate, achievable objectives and targets for the prevention of pollution. 
  • We periodically review our environmental objectives and targets.
  • We maintain records regarding environmental policies, procedures, and performance.

The Axcelis Environmental Leadership Team (AELT) is responsible for the overall performance of the Environmental Management System, and for setting and reviewing environmental objectives, targets, and goals.  EHS staff will assist the AELT in ensuring that Axcelis’ environmental objectives, targets and goals, and Axcelis’ Environmental Management System appropriately minimize the environmental impacts of our activities, products and services. 

The Axcelis Environmental Policy is communicated to all personnel working at Axcelis’ facilities and is available to the public.

The Scope of our Environmental Management System includes all activities for the manufacture of semiconductor manufacturing equipment and similar products at the headquarters plant at 108 Cherry Hill Drive, Beverly MA.

Health and Safety Management System

Our Health and Safety policy states:

Axcelis Technologies, Inc. understands that the success of the company depends, ultimately, on the performance of its employees.  The company realizes that sustained high performance is dependent, among other factors, on the maintenance of a high level of employee health and safety.  In support of this principle, Axcelis Technologies is committed to the following:

  • Preventing occupational injuries and illnesses to our employees, visitors and contractors
  • Compliance with all occupational health and safety regulations, legislation, and other requirements applicable to our business and its OH&S hazards
  • Continual improvement our OH&S management and performance
  • Setting appropriate, achievable objectives and targets for the prevention occupational injuries and illnesses
  • Periodically reviewing our OH&S objectives and targets
  • Maintaining records regarding OH&S policies, procedures, and performance.

The Axcelis Environmental, Health and Safety (EHS)  Leadership Team (AELT) is responsible for setting and reviewing OH&S objectives, targets, and goals.  EHS staff will assist the AELT in ensuring that Axcelis’ OH&S objectives, targets and goals, and Axcelis’ OH&S Management System appropriately control the OH&S risks associated with our activities.

The Chief Executive Officer is Top Management’s OH&S Management Representative on the AELT.

The Axcelis OH&S Policy is communicated to all personnel working at Axcelis facilities and is available to visitors and the public.   All Axcelis employees and contractors are responsible for understanding the Axcelis health and safety policy and for complying with it

Our EHS Performance

2017 Environmental Health and Safety Performance Results

Total Electricity Used at our Beverly, MA headquarters and manufacturing facility increased by 4%, however when measured as MM KwH per system shipment, electricity use was reduced by 38%.

Total Direct Greenhouse Gas (GHG) Emissions at our Beverly facility increased by 2%, however when measured as tons of CO2e per system shipment, Direct CO2e emissions were reduced by 41%.

 Chemical GHG Emissions were less than 2000 tons, a 7% reduction from 2016

Maintained Small Quantity Hazardous Waste Generator Status with an average monthly total of 863 pounds.

Worldwide OSHA Recordable Equivalent Accident Rate (OSHA Rate) remained at < 1.0 cases per 100 employees

 Average monthly on time completion of EHS training was 98.9%

2018 Environmental Health and Safety Goals and Objectives

Achieve Registration of our environmental management system to ISO 14001:2015

Reduce Total Beverly Direct / Indirect GHG to < 240 Tons / Tool or < 15,000 Tons total;

Maintain Beverly Direct GHG Emissions to < 5000 Tons CO2e; Use < 5 Pounds SF6 per Purion XE shipped

Implement at least 1 GHG reducing commuter benefit

Continue to manage supply chain sustainability programs

Continue to achieve on-time completion of EHS training at > 98%