Axcelis' medium current implant product line gives customers the flexibility, precision and productivity for the widest array of low energy, mid dose applications, especially well, channel and HALO processes. The platform utilizes a patented angular energy filter, providing an exceptionally pure beam to ensure maximum performance while eliminating all forms of energy contamination.

  • Purion M: Axcelis' newest mid dose, single wafer platform provides solutions for device manufacturing's lowest energy applications and mid dose requirements with the versatility and extendibility to provide solutions beyond today's 22nm technology node at the industry‚Äôs highest productivity and lowest cost of ownership.