Maximize Uptime and Productivity

Axcelis offers a wide array of programs to provide customers with high quality spare parts and consumables, where and when you need them.  We maintain spare parts depots around the globe, to ensure rapid response and maximum uptime.  If you have unique requirements, we offer flexible programs to customize your solutions to meet your needs.

Axcelis Managed Inventory

Ensures you have the right parts in the right place and at the right time. Backed by 30 strategically located parts depots, the program helps you better manage your parts planning and logistics needs.

SMART Program

SMART (Spares Management And Replenishment Tracking) is Axcelis' Web-based supplier-managed inventory system. As a program participant you can maintain a customized consumable parts inventory at your facility, guaranteeing that critical OEM-quality components are always available.

Access SMART here

Reconditioning & Rebuilding Services - An outsourcing option for cleaning and rebuilds. We work with Axcelis-certified partners to develop cleaning solutions for new implant subassemblies.

REACH Database:

Through this website, you can find Substance(s) of Very High Concern (SVHC) as defined by the EU Regulation (EC) NO1907/2006 of the European Parliament and of the Council of 18 December 2006 concerning the Registration, Evaluation, Authorization and Restriction of chemicals (REACH).

Access REACH database here