1981
- NV-10-80 introduced, raising the energy to 80 keV
- NV-3206 introduced with industry’s first 150mm capability and throughputs of 220 wph
- Eaton completes Acquisition of Nova
- ‘Father of Ion Implantation – The Early Years’ by Peter Rose and Geoff Ryding
- ‘Nova – A History’ by Peter Rose
