1994

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  • Eaton introduced the world’s first production high energy system, with a throughput of 210 wph and a footprint that fits into a standard fab bay
  • The NV-GSD-HE was the integration of the GSD end station and the LINAC technology from the NV-1000 and NV-1002. This marked the beginning of another period of rapid growth and innovation
  • The growth in high energy over the next several years was extremely rapid as high energy well isolation techniques became commonplace at reasonable CoO thanks to the reliability of the LINAC design
  • The flexibility and reliability of the basic LINAC design continues to support Axcelis market leadership in high energy ion implantation