Ion Implantation Equipment | Axcelis

About Us

Leadership

A Deep Bench of Semiconductor Industry Leaders

Russell Low, PhD

President and Chief Executive Officer

Dr. Russell Low became Axcelis’ CEO in May 2023. Dr. Low joined Axcelis in October 2016, first serving as Executive Vice President, Engineering and then as Executive Vice President, Global Customer and Engineering Operations effective January 2021. Prior to joining the Company, Dr. Low held the position of Vice President of Engineering, MOCVD Business Unit at Veeco Instruments since 2013, prior to which he was Veeco’s Senior Director of Engineering, Molecular Beam Epitaxy Business Unit beginning in 2012.

From 2003 to 2012, Dr. Low held a number of positions at Varian Semiconductor Equipment Associates, most recently as Director of Technology. Prior to that, Dr. Low held engineering positions in the thermal processing and ion implant divisions of Applied Materials, Inc. Dr. Low received his Ph.D. in Physical Chemistry from Oxford University. He also holds an Executive MBA from the Massachusetts Institute of Technology, a BS degree from Southampton University, and was a Visiting Fellow at Stanford University. He has 44 granted US patents over multiple categories and has authored over 20 refereed papers.

James Coogan

Executive Vice President and Chief Financial Officer

Mr. Coogan joined Axcelis as Executive Vice President and CFO in September 2023. Mr. Coogan brings more than 20 years of finance, accounting, and investor relations experience across multiple industries, most recently in aerospace and defense. Mr. Coogan joins Axcelis after serving as Senior Vice President, Chief Financial Officer at Kaman Corporation, a leading provider of aerospace and defense products. During his 15 years with Kaman, he held various management positions including Vice President, Investor Relations and Corporate Development, Assistant Vice President, External Reporting and SEC Compliance, and Director, External Reporting and SEC Compliance.

After starting his career at PwC, he held several financial management roles at Ann Taylor Stores Corporation and Mohegan Tribal Gaming Authority before joining Kaman. He holds a Master of Business Administration from Yale School of Management, a Master of Science in Accounting from the University of Connecticut and a Bachelor of Science in Business Administration, Accounting from the University of Connecticut.

Gerry Blumenstock

Executive Vice President, Engineering

Gerry Blumenstock became Axcelis’ Executive Vice President, Engineering in June 2023 leading product development, engineering and R&D. With over 30 years of experience in technology, primarily in the semiconductor capital equipment industry, Gerry brings a unique blend of leadership, technical and business skills gained over a distinguished career. Before joining Axcelis, Gerry led multiple product business groups as Senior Vice President and General Manager at Veeco Instruments and Vice President and General Manager at Advanced Energy.

Additionally, Gerry held the role of Chief Marketing Officer at Veeco directing a corporate rebrand. Prior to that, Gerry held Senior Director level business roles at KLA, Cymer (ASML) and FormFactor, bringing several new products to market. Gerry began his career as an Optics & Materials Engineer at SVGL (ASML) and NASA. Gerry holds a B.S. and M.S. in Physics from the University of Maryland where he conducted research in ion-beam deposited thin film coatings for space-based instruments. He has four US patents in EUV lithography equipment and has authored numerous refereed papers on a wide variety of technologies.

Lynnette C. Fallon

Executive Vice President, Human Resources and Legal, General Counsel

Lynnette Fallon oversees Axcelis’ legal and human resources operations, and also serves as Axcelis’ corporate secretary. Ms. Fallon has held her current position since May 2005, having initially joined Axcelis in 2001 as a Senior Vice President and General Counsel. As a member of Axcelis’ executive team for more than twenty years, Ms. Fallon has been involved with business development, financial and tax management, investor relations, public offerings, M&A, risk management, executive compensation, and all aspects of international corporate compliance.

Before joining Axcelis, Ms. Fallon worked at the Boston law firm of Palmer & Dodge LLP, as a partner since 1992, prior to which she was an associate since 1987. During her more than ten years at Palmer & Dodge, Ms. Fallon’s work was primarily for clients in the biotech industry. She was head of Palmer & Dodge’s business law department for the three years prior to joining Axcelis. Ms. Fallon’s M&A and financial transaction experience began in 1984 at a Wall Street boutique firm, doing tax-driven LBOs, venture capital and private equity transactions. She holds a J.D., cum laude, from the School of Law at Boston University and a B.A. with departmental and general honors, Phi Beta Kappa, from Vassar College.

Rob Mahoney

Senior Vice President, Global Operations

Robert Mahoney became Axcelis’ Senior Vice President, Global Operations in 2014. He has responsibility for all aspects of production including the manufacturing, logistics, global sourcing, facilities and EHS organizations. Rob joined Axcelis in 2005, first serving as Vice President of Quality and Product Support, and then as Vice President, Global Service Solutions and Quality. With over 30 years of experience in manufacturing technology, primarily in the semiconductor capital equipment industry, Rob brings a unique blend of leadership and technical expertise gained over a distinguished career.

Before joining Axcelis, Rob held multiple senior management positions including Global Quality Manager at Varian Semiconductor and Director of Quality Assurance at Genus. Rob began his career in various manufacturing engineering roles at Textron Defense Systems. Rob holds a B.S. in Mechanical Engineering from the University of Massachusetts Lowell, and a M.S. in Management from Lesley University.

Greg Redinbo, PhD

Executive Vice President, Marketing and Applications

Greg Redinbo leads our efforts in developing products and marketing strategies. He joined Axcelis in 2021 as Senior Vice President of Strategic Marketing and Business Development. Greg has over 25 years of experience in the semiconductor capital equipment industry. Prior to joining Axcelis, he held the position of Vice President, Global Strategic Accounts at ASML, where his focus was on business and relationship growth with a leading logic manufacturer and prior to that was Global Vice President of Sales, Service and Applications at FEI, a microscopy solutions company.

His past positions also include Director of Sales, US and Europe, and Director of Product Marketing, High Current Products at Varian Semiconductor and Product Management in the Thermal Processing Division at Applied Materials. Greg holds a Ph.D. in Applied Physics from Cornell University and Bachelor of Science in Electrical Engineering from the University of California, Davis. He has published numerous technical papers and holds a number of patents.

Chris Tatnall, PhD

Executive Vice President, Global Customer Operations

Dr. Chris Tatnall became Axcelis’ Executive Vice President, Global Customer Operations in September 2023. In this capacity, Dr. Tatnall is responsible for Worldwide System Sales and Sales Operations, Global Service, Support and Training and the Axcelis Customer Solutions organization. Chris joined Axcelis in March 2022 as Senior Vice President of Sales. Prior to joining Axcelis, Chris was Vice President and General Manager at MKS Instruments, Plasma and Reactive Gas Division, where he led a cross functional team of over 200 members with multiple product lines with both semiconductor and industrial applications.

Prior to that, Chris was Senior Director of Customer Operations at Brooks Automation, Semiconductor Sales Manager at Alcatel Vacuum Technology, and Development Engineer at Edwards Vacuum. Chris holds a Bachelor of Science in Physics and Medical Physics from Exeter University and a PhD in Thin Film Magnetic Physics from Salford University. He has authored multiple refereed papers pertaining to materials science and characterization.